Rui Chen, Xiaohong Chen, Long Bai, Qian Tang
A theoretical model is presented for the analysis of the electric field and electrostatic adhesion force produced by interdigital electrode arrays. The electric field is derived by solving the Laplace equation for the electrical potential in each subregion. The electrostatic adhesion force is calculated using the Maxwell stress tensor formulation. The dynamic properties of the electric field and electrostatic adhesion force are assessed by evaluating the transient response of the field and force under a step in applied voltages. Experimental studies are carried out to evaluate the adhesion performance of an electrode panel on a glass pane, and the experimental results verify the correctness of the theoretical model.