DING, Y.-Y. .; JIANG, Y. Prediction on MRAM Etching Endpoint by Response Surface Method. Journal of Modern Mechanical Engineering and Technology, [S. l.], v. 10, p. 71–82, 2023. DOI: 10.31875/2409-9848.2023.10.06. Disponível em: https://zealpress.com/jms/index.php/jmmet/article/view/495. Acesso em: 29 mar. 2024.