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International Journal of Robotics and Automation Technology

Articles

Vol. 1 No. 1 (2014)

A Survey on Recent Development of Large-Stroke Compliant Micropositioning Stage

DOI
https://doi.org/10.15377/2409-9694.2014.01.01.3
Submitted
March 10, 2014
Published
10.03.2014

Abstract

Compliant micropositioning mechanism plays an important role in precise positioning and alignment applications. Unlike conventional guiding mechanism, compliant mechanism delivers motion through the deformation of flexible components. As a result, the movement of flexible mechanism is continuous and the structure is more compact, which makes it a hot research topic in the field of precision machine design. As the increase of demands for micropositioning stage providing large motion range and high precision, this paper conducts a state-of-the-art survey on recent development on large-stoke compliant microopsitioning stages. First, a basic introduction of the compliant micropositioning stage is presented. The type synthesis and mechanism structure design of the flexible component are reported, which are the decisive factors determining the stage performance. Then, the design method of flexure hinge is introduced. Afterwards, the development of large-stroke compliant mechanism in recent years is reviewed, and a comparison study of several typical large-stroke compliant micropositioning stage is carried out. The existing issues and future work on the large-stroke compliant micropositioning stage are summarized.

References

  1. Zhao H, Lv ZQ. Status and Trends of the Piezoelectric MicroDisplacement Mechanism[J
  2. Xu SL, Chen D. Precision Ultra-Precision Positioning Technology and its Applications[J
  3. Wang XK, Wu D, and Cheng CY. The Review of Precision and Ultra-Precision Processing Technology[J
  4. Yuan ZJ, Wang XK. Precision and Ultra-Precision Machining Technology [M
  5. Zeng B. Design and Study on the Friction Driving Micro Displacement Working Platform [D
  6. Yan YD, Sun T, and Dong S. Design and Experimental Analysis of Micro-displacement Worktable Using New Type Driver[J
  7. Lei Y, Chen BY, and Yang YZ. Development of Micromotion Stage with Nanoscale Resolution[J
  8. Huang ZB, Ge WJ, and Ma LE. Present State of Compliant Mechanism and Its Future Application in Bionics[J
  9. Sun LN, Rong WB, and Qu DS. Research on a Large Travel and High Resolution Rotary Micro-driver Based on Micromanipulation[J
  10. Li Y. Peristaltic-type piezoelectric/electrostrictive microfilm feed research institutions[J
  11. Howell LL. Compliant Mechanisms [M
  12. Kagawa Y, Mutou E. The Accuracy Improvement of a Piezoelectric Inchworm Mechanism[J
  13. Higuchi, Watanabe M, and Kudoh K. Precision Positioner Utilizing Rapid Deformations of a Piezoelectric Element[J
  14. Sun SY. Research of Macro/Micro Combined Dual-Driven High-Precision Positioning System [D
  15. Choi KB, Lee JJ, and Kim MY. Cartwheel flexure-based Compliant Stage for Large Displacement Driven by a StackType Piezoelectric Element [C
  16. Yu TL, Lee JJ. Structural Synthesis of Compliant Translational Mechanisms [C
  17. Shorya A, Alexander HS. Constraint-based Design of Parallel Kinematic XY Flexure Mechanisms[J
  18. Devaprakasam D, Biswasa SK. Design of a Flexure for Surface Forces Apparatus[J
  19. Li YM, Xu QS. Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator[J
  20. Li YM, Xu QS. Design and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges[J
  21. Sun BY, Lin JQ, and Wang DY. Research on Super-precise Positioning Stage Based on Piezo-electric Actuator[J
  22. Duan ZY, Wang QK. Development of a Displacement Positioning Platform of Novel Nanometer Resolution[J
  23. Zong GH, Pei X, and Yu J. Novel compliant linear guiding mechanism and analysis of kinetic precision[J
  24. Yu JJ, Pei X, and Bi SS. State-of-arts of Design Method for Flexure Mechanisms[J
  25. Li SZ, Yu JJ, and Zong GH. Type Synthesis and Principal Freedom Analysis of Parallel Flexure Mechanisms Based on Screw Theory[J
  26. Howell LL, Midha A. Parametric deflection approximations for end-loaded, large-deflection beams in compliant mechanisms[J
  27. Yu JJ, Bi SS, and Zong GH. Stiffness Matrix Method for Displacement Analysis of Fully Spatial Compliant Mechanisms[J
  28. Slocum A H. Precision Machine Design [M
  29. Blanding DL. Exact Constraint: Machine Design Using Kinematic Principle [M
  30. Hale LC. Principles and Techniques for Designing Precision Machines [D
  31. Awtar S, Slocum AH. Constant-Based Design Of Parallel Kinematic XY Flexure Mechanisms[J
  32. Hopkins JB, Culpepper ML. Synthesis of multi-degree of freedom, parallel flexure system concepts via freedom and constraint topology (FACT)[J
  33. Hopkins JB, Culpepper ML. Synthesis of Multi-Degree of Freedom, parallel flexure system concepts via freedom and constraint topology (FACT)[J
  34. Su HJ, Dorozhkin DV, and Vance JM. A Screw Theory Approach for the Conceptual Design of Flexible Joints for Compliant Mechanisms[J
  35. Yu JJ, LI SZ, and Pei X. Type Synthesis Principle and Practice of Flexure Systems in the Framework of Screw Theory Part I: General Methodology [C
  36. Trease BP, Lu KJ, Kota S. Biomimetic compliant system for smart actuator-driven aquatic Propulsion: Preliminary results [C
  37. Kim CJ. A Conceptual Approach to the Computational Synthesis of Compliant Mechanisms
  38. Bernardoni P, Bidaudp, Bidardc. A New Compliant Mechanism Design Methodology Based on Flexible Building Blocks [C
  39. Grossard M, Rotinat LC, Chaillet N. Flexible Building Blocks Method for The Optimal Design of Compliant Mechanisms Using Piezoelectric Material [C
  40. Maxwell JC, Niven WD. General Considerations Concerning Scientific Apparatus [M
  41. Hopkins JB, Culpepper ML. Synthesis of Multi-Axis Serial Flexure Systems [C
  42. Ball RS. A treatise on The Theory of Screws [M
  43. Dobrjanskyj L, and Freudenstein F. Some Application of Graph Theory to the Structural Analysis of Mechanisms[J
  44. Shan MC, Wang WM, Ma SY, Shuang S, and Xie H. Analysis and Design of Large Stroke Series Flexure Mechanism[J
  45. Wang SM, Yun X, and Chen JZ. Design and Analysis on Micro Displacement Magnifying Mechanism with Flexible Hinges[J
  46. Zhao SS, Bi SS, Zong GH, and Yu JJ. New Large-deflection Flexure Pivot Based on Curved Flexure Element[J
  47. Xu QS. New Flexure Parallel-Kinematic Micro-positioning System with Large Workspace[J
  48. Tang X, Chen IM. A Large-Displacement and Decoupled XYZ Flexure Parallel Mechanism for Micromanipulation [C
  49. Awtar S, Parmar G. Design of a Large Range XY Nanopositioning System[J
  50. Xu QS, Design and Development of a Compact FlexureBased XY Precision Positioning System With Centimeter Range [J
  51. Li ZG, Yu JJ. A Novel Large-Range XY Compliant Parallel Micromanipulator [J
  52. Hao G, Kong X. A Novel Large-Range XY Compliant Parallel Manipulator with Enhanced Out-of-Plane Stiffness [J
  53. Hopkins J B, Culpepper M L. Synthesis of Precision Serial Flexure Systems Using Freedom And Constraint Topologies (FACT) [J
  54. Dong W. Researches on the Wide-Range Flexure Hinge Based 6-DOF Parallel Manipulator System [D
  55. Lobontiu N, Paine JSN, Garcia E, and Goldfarb M. Cornerfilleted Flexure Hinges [J
  56. MohdZubir MN, Shirinzadeh B. Development of a High Precision Flexure-Based Microgripper [J
  57. De Bona F, Munteanu MG. Optimized flexural hinges for compliant micro-mechanisms [J
  58. Goldfarb M, Celanovic N, Modeling piezoelectric stack actuators for control of micromanipulation [J
  59. Adriaens HJMTS, De Koning WL, and Banning R. Modeling Piezoelectric Actuators [J
  60. Tian Y, Shirinzadeh B, Zhang D, and Zhong Y. Three Flexure Hinges for Compliant Mechanism Designs Based on Dimensionless Graph Analysis [J